微机械角速度传感器信号分析与处理

Signal Analysis and Processing of Micro machine Angular Velocity Sensor

介绍了一种新型微机械角速度传感器的工作原理 ,详细分析了该传感器的干扰成分 ,提出了消除干扰力矩影响的信号处理方法。设计了静电力反馈控制方案 ,并进行了计算机仿真 ,证明该方法具有实用性。

The principle of a kind of new micro machine angular velocity sensor is introduced,the disturbing components of this sensor are analyzed in detail,and the signal processing methods that are used to eliminate the effects of jamming moment are proposed.The static electrical force feedback control way has been designed,and the results of computer simulation testify that this way is useful.