镍酸镧陶瓷靶材的制备工艺

Preparation of LaNiO_3 ceramic target

采用固相反应法制备镍酸镧(LaNiO3)粉体,利用常压烧结法烧结LaNiO3陶瓷靶材。探索了制备LaNiO3陶瓷粉体的工艺条件;利用X射线衍射(XRD)和扫描电镜(SEM)分析了固相反应热处理工艺及烧结工艺对LaNiO3陶瓷粉体及靶材的相组成及微观形貌的影响。结果表明:在氧气气氛中,900℃下煅烧10 h可获得纯度较高、晶粒细小的LaNiO3粉体;烧结温度为1100℃保温4 h时,获得了比较致密且晶粒分布均匀的LaNiO3陶瓷靶材,同时电阻率达到了0.52 mΩ·cm。

LaNiO3 powders were synthesized by solid reaction method and the LaNiO3 ceramic target was prepared using pressureless sintering method. The process parameters for preparing the LaNiO3 powders was explored based on experiment. Effects of solid state reaction heat treatment and sintering process on crystal structure and phase composition of LaNiO3 ceramic target were investigated by scanning electron microscopy and X-ray diffraction, respectively. The results show that smaller and higher purity LaNiO3 powder can be obtained when calcinating in an O2 atmosphere at 900℃ for 10 h. At the same time, the dense LaNiO3 ceramic target, with homogeneous grain size, also can be prepared after sintering at 1100℃ for 4 h, with the resistivity reaching 0.52 mΩ.cm.