摘要
用蒙特卡罗(MonteCarlo)方法计算Au—SiOz界面的剂量增强系数(DEF)随能量的变化关系及不同厚度的Au对Au—SiOz界面剂量增强系数的影响。结果表明:界面下的DEF与Au的厚度有关,当Au厚度从1gm增加到9tam,DEF随之增大;当Au厚度超过9tam,随Au厚度增加DEF减小。当x射线能量为10~250keV时,界面附近SiO。一侧存在不同程度的剂量增强,而且在整个能量范围内出现了两个明显的峰值,其中剂量增强系数最大值达40.4。
Using Monte Carlo method, calculated are the relationships between X-ray energy and dose enhancement factor(DEF) at gold-silicon dioxide interface, and the effect of the differ- ent gold thicknesses on the DEF at this interface. The results show that the DEF relates with the gold thickness. The DEF increases with the gold thickness, from 1 μm to 9 μm, and above 9 μm, the DEF decreases with gold thickness. When the X-ray energy ranges from 10 to 250 keV, there are interface dose enhancement in varying degrees with two distinct peaks and the maximum dose enhancement factor is 40.4.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2013年第5期425-427,440,共4页
Research & Progress of SSE
基金
国家自然科学基金资助项目(11265009)
内蒙古民族大学科学研究基金资助项目(NMD1218)
关键词
X射线
半导体
蒙特卡罗方法
界面
剂量增强
X-ray
semiconductor
Monte Carlo method
interface
dose enhancement