摘要
微细电火花技术在加工微小孔或具有复杂形状的零件时,由于工件尺寸较小,电极的制备比较困难。本文利用块电极反拷法在线制作和修正工具电极,所获得的电极同轴度较好,长径比L/R在30以上,平均直径为0.012mm,尖端直径在5μm左右。加工出了相应的微小孔,精度在±0.003mm。总结了反拷法的加工工艺特性和电参数的选择,为以后的MEMS器件加工提供好了有效的方法。
Micro-EDM technology in the processing of tiny holes or parts with complex shapes, due to the smaller size of the workpiece, the electrode preparation is more difficult, using anti-copy method online production and correction tool electrode block electrode, the electrode with preferably axis, the aspect ratio L/R of 30 or more, the average diameter of 0. 012mm, the tip diameter of about 5μm, the processing corresponding to the tiny holes, summarizes the selection of the processing characteristics and electrical parameters of the anti-copy method, to provide an effective method for the MEMS device fabrication.
出处
《工具技术》
2013年第10期61-63,共3页
Tool Engineering
