砷化镓扩散长度的变加速电压束感生电流法测量

Determination of diffusion length of GaAs by electron beam acceleration voltage scanning

计算了变加速电压的束感生电流法测定扩散长度理论公式 ,并用电子探针和扫描电镜测量了各种GaAs材料的扩散长度。

The numerical solution of steady state equation of electron beam induced current under different acceleration voltages for Schottky barrier structure have been calculated. The diffusion length of GaAs have been measured by electron probe and SEM.