碳纳米管在金刚石薄膜化学沉积上的应用

Application of Carbon Nanometre Tubes in Chemical Deposition on Diamond Film

碳纳米管的端头部位 ,具有一定的金刚石结构。用于金刚石薄膜气相化学沉积 ,作为籽晶 ,可使薄膜沉积的速度加快 ,结晶的定向性强 ,生长的温度低等优点。本文探讨了碳纳米管的结构 ,初步研究了其在金刚石薄膜气相化学沉积上的应用 ,得到了较好的 <10 0 >

The top of carbon nanometre tube have some diamond structure.As seed crystal in diamond film of vapor chemical deposit ion,the biger deposition rate of diamond film,the strong orient of cryst aline and the low growth temperature,etc. can be obtained.This paper investigaed the structure of car bon nanometre tube and its application in vapor chemical deposition on diamond f ilm,and a good film of <100> plane was obtained.