微机械微波共平面波导特性阻抗的有限元法分析

Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines with FEM

本文在相似剖分有限元法的基础上 ,结合微机械微波共平面波导的结构特点 ,提出了混合相似剖分有限元技术并应用于微机械微波共平面波导特性阻抗的数值计算 ,分析了其特性阻抗及其随参数的变化 ,并给出常用35Ω、5 0Ω、75Ω、12 0Ω波导的具体设计尺寸 .

A new similarity method in FEM is presented for researching of the problems about the nonuniform and irregular region,such as micromachined microwave coplanar waveguide,which can be fabricated through a commercial CMOS process.By using this new method,we calculate the characteristic impedance of this kind of suspended waveguide and analyze the change with its dimensions.From the result,we summarize the different structures with characteristic impedance of 35Ω、50Ω、75Ω、120Ω.