期刊文献+

新型高重复频率脉冲CO_2激光器 被引量:3

Novel high repetition-rate pulse CO_2 laser
下载PDF
导出
摘要 报道了一种新型高重复频率的脉冲CO2激光器。该型激光器结构紧凑,激光器外型尺寸为300 mm×300 mm×300 mm,工作气体放电增益体积为12×103mm3,谐振腔的长度为310 mm。为了获得大体积均匀稳定的气体放电,激光器采用了紫外电晕预电离方式。在激光器自由运转时,单脉冲激光的输出能量达到15 mJ,输出脉冲的半高全宽为70 ns。激光器采用紧凑型高速涡轮增压风机,在一个大气压的条件下,气流循环速度超过100 m/s,激光脉冲重复频率为1.5 kHz,采用大体积强迫冷却和气体主动置换技术,可以获得较长时间激光稳定输出。在已有的实验基础上,采用光栅调谐,可快速准确地实现高重复频率脉冲CO2激光器的谱线选支输出。 A novel transversely excited atmospheric (TEA) CO2 laser with high repetition- rate was reported. The size of laser is 300 mmí300 mmí300 mm. The discharge volume is 12í103 mm3, the length of cavity is 310 mm. The ultraviolet preionization makes the discharge even and stable, the output energy can be as high as 15 mJ under the circumstance of free oscillation, and the full width at half maximum of the light pulse is 70 ns. To acquire the high wind velocity, a turbocharger was used in the system of the fast- gas flow cycle. When the pressure in the cavity is 100 kPa, the wind speed is 100 m/s, and the repetition rate of the TEA CO2 laser is up to 1.5 kHz. On the basis of preliminary experiment, the system of the grating tuning line selection can be applied to the high repetition- rate pulse laser to abtain the output of grating line selection accurately and fast.
出处 《红外与激光工程》 EI CSCD 北大核心 2013年第10期2697-2701,共5页 Infrared and Laser Engineering
关键词 脉冲CO2激光器 高重复频率 紫外预电离 pulse CO2 laser high repetition rate ultraviolet preionization
  • 相关文献

参考文献4

二级参考文献23

共引文献8

同被引文献31

  • 1宋峰,刘淑静,颜博霞.激光清洗——富有前途的环保型清洗方法[J].清洗世界,2004,20(5):43-48. 被引量:24
  • 2宋峰,苏瑞渊,邹万芳,刘淑静.艺术品的激光清洗[J].清洗世界,2005,21(10):34-37. 被引量:9
  • 3王刚,王石语,蔡德芳,文建国,过振.声光调Q衍射效率对脉宽压缩的影响研究[J].光子学报,2006,35(1):13-15. 被引量:5
  • 4Wu B, Kumar A. Extreme ultraviolet lithography and three dimensional integrated circuit-a review [J]. Applied Physics Reviews-Focused Review, 2014(1): 011104.
  • 5Brandt D C, Fomenkov I V, Farrar N R, et al. CO2/Sn LPP EUV Sources for device development and HVM [C]// Conference on Extreme Ultraviolet (EUV) Lithography IV, 2013: 8679: 86791G.
  • 6Ohta T, Nowak K M, Suganuma T, et al. Development of the reliable high power pulsed carbon dioxide laser system for LPP EUV light source [C]llConference on Extreme Ultraviolet (EUV) Lithography III, 2012: 8322: 832220.
  • 7Xu Y G. Theoretical study on phase-locking of a radial array CO2 laser[J]. Optics Communications, 2014(331): 244-250.
  • 8Zhang Y C, Tian Z S, Sun Z H, et al. High pulse repetition frequency RF excited waveguide CO2 laser with mechanical Q- switching[J]. Infrared Physics & Technology, 2013, 58: 12-14.
  • 9Zhang Y C, Tian Z S, Sun Z H, et al. Study of frequency stabilization for electro-optical Q-switched radio-frequency- excited waveguide CO2 laser using build-up time method [J]. Applied Optics, 2013, 52(16): 3732-3736.
  • 10Xie J J, Guo R H, Li D J, et al. Theoretical calculation and experimental study of acousto-optically Q-switched CO2 laser [J]. Optics Express, 2010, 18(12): 12371-12380.

引证文献3

二级引证文献37

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部