一种10kW 40kHz正弦波镀膜电源的研制

Design of a 10kW 40kHz Sinusoidal Wave Power Supply Applied Into Sputtering Coating

正弦波中频电源广泛应用于溅射镀膜领域。设计了一种以IGBT为功率器件的10 kW 40 kHz正弦波镀膜电源,主电路采用移相全桥电路进行电压调整,输出电路采用LCLC四阶滤波电路。详细分析设计了主电路以及控制电路,并依据理论分析结果采用PSIM进行了电路仿真和样机实验,验证了理论分析的正确性。实验结果证明,正弦波电源输出工作在40 kHz,具有负载调节范围宽、效率高的特点。

The sinusoidal wave power supply is widely used in sputtering coating.The paper designs an IGBT power devices 10 kW 40 kHz sinusoidal wave power supply in sputtering coating, the main circuit voltage adjustment phase- shifted full-bridge circuit, the output circuit using the LCLC four order filter circuit, analysis the design of the main circuit and control circuit.Based on the results of theoretical analysis,the PSIM circuit simulation and the experiment prove the correctness of theoretical analysis.Experimental results show that the sinusoidal wave power supply output at 40 kHz, has a wide range of load regulation, high efficiency characteristics.