纳米器件制备的新方法——微接触印刷术

A New nano-fabrication Method—Microcontact Printing

微接触印刷术是一种纳米器件制备的新方法 ,能在金、银、硅片、陶瓷等基材表面印刷出纳米 -微米量级的精细结构 ,印制导电高分子微电路 ,以及制作三维结构微制品。该方法精确重复 ,工艺简单 ,对实验室条件要求也不高 ,在微电子学、超微机械加工等超微器件制备中有很好的应用前景。

Microcontact printing (μCP) is a newly developed technology on microfabrication.It is used to pattern nano or micro structures on Au,Ag,Si and ceramic,also to produce 3\|dimension structures.This method is easy to carry out in normal laboratory conditions and to transfer patterns accurately and repeatly.It has extensive applications in the fabrication of micro\|electric,micro machinery,micro optic apparatus and other micro devices.