摘要
聚酰亚胺 (Kapton)薄膜在经过 1MeV、1 5MeV、2MeV的He+离子注入后 ,表面硬度和耐磨性能发生了很大的变化 ,测试结果表明随着注入He+离子能量的提高 ,薄膜的表面硬度随之增大 ,且均大于未注入的样品 ;样品最佳耐磨性能并不出现在最高注入能量下 ,而是在一中等能量下获得 .通过X 射线光电子能谱(XPS)实验得出注入He+离子后的薄膜表面层中O、N原子含量降低 。
Polyimide (Kapton) was implanted with He\++ ions at energies of 1MeV,1 5MeV,2MeV,respectively, and its surface hardness and wear resistance were characterized.Results of tests indicated that hardness values of all implanted specimens increased over those of the unirradiated material, particularly for specimens implanted at 2MeV.The hardness improved from 0 55GPa for unimplanted Kapton to 6 7GPa,corresponding to a factor of improvement of about 12.Reciprocating sliding wear tests using a steel ball counterface yielded significant improvements for the 1MeV energy implantation. A similar wear improvement was not obtained for the other two energy implantation.It showed that optimum wear properties did not exist at the highest implantation energy but rather at an intermediate energy.These improvements in properties are apparently related to the effectiveness of cross linking.The results of X\|ray photoemission spectroscopy (XPS) proved that after irradiation,the contents of O, N atoms decreased in the surface and a new three\|dimensional covalent bonded structure,mainly constructed by phenyl,was formed.
出处
《高分子学报》
SCIE
CAS
CSCD
北大核心
2000年第6期791-794,共4页
Acta Polymerica Sinica
基金
国家自然科学基金! (基金号 5 96 730 0 3)
关键词
硬度
耐磨性
XPS
离子注入
聚酰亚胺薄膜
Surface hardness, Wear resistance, XPS, Ion implantation, Kapton