钇的预注入对Ti-6Al-4V合金氮等离子体浸没离子注入行为的影响

Effect of Yttrium Pre-Implantation on Implantation Behavior of Ti-6Al-4V Alloy in Nitrogen Plasma Immersion Ion Implantation

为了提高氮等离子体浸没离子注入Ti 6Al 4V合金时氮原子的峰值深度 ,利用钇来增加氮在基体中的注入深度和扩散深度 ,先用 2 0kV的电压进行钇等离子体浸没离子注入处理 ,然后用 30kV的电压进行氮等离子体浸没离子注入处理。俄歇能谱测试表明氮原子的峰值深度有明显提高 ,注钇时间为 30min的试件 ,氮原子的峰值深度从 5 0nm上升到 10 0nm。摩擦性能测试表明处理后试件的抗磨损能力大大提高。

In order to increase the peak depth of nitrogen atoms during the nitrogen plasma ion implantation of Ti 6Al 4V alloy, the rare earth metal yttrium was used to increase the implantation and diffusion depth of nitrogen atoms. In the experiment, the yttrium ions were implanted under the voltage of 20 kV firstly, and then the nitrogen ions were implanted under 30 kV. The Auger spectrum shows that the peak depth of the nitrogen atoms increases in the samples with yttrium implantation. In the sample with yttrium implantation of 30 min, the peak depth of nitrogen atoms increases from 50 to 100 nm. It can also be seen from the tribology test that the wear resistance of these samples is increased greatly.