基于单幅扫描电镜图像的三维重建技术（英文）

Three-Dimensional Reconstruction Techniques Based on One Single SEM Image

本文提出了一种对黑硅表面进行三维重建的方法.通过对扫描电子显微镜的成像原理进行建模,该方法可以只使用单幅从黑硅表面正上方垂直向下拍摄的扫描电子显微镜图像获得黑硅表面的三维信息.该方法简单易行.本文对这一方法进行了重建测试.测试结果表明该方法能够获得比较理想的重建效果.

This paper proposes a method for reconstructing the three-dimensional topography of black sili-con surface. By modeling the imaging principle of scanning electron microscopy （SEM）, this method can use only one single SEM image taken from the top to get the 3D information of silicon surface and is very easy to implement. Then the reconstruction result is tested, and the test results show that this method works well.