摘要
研究了用电感耦合等离子体质谱(ICP-MS)测定高纯气体五氟乙烷中铝、磷、硼等杂质的分析方法.在最佳仪器条件下,通过选择合适的吸收液与测定同位素、采用Sc作为内标以及碰撞池技术,避免了基体效应以及多原子离子对测定的干扰.方法简单、灵敏度高,对高纯气体的质量监控有指导意义.
A new method for simultaneous determination of trace A1, B and P in high-purity gas by ICP-MS was established. Under optimized conditions, the matrix and MS interferences were corrected by Sc as internal standard element,optimized absorption solution and KED technique. The method was sensitive and simple,which could satisfy the requirements of production.
出处
《河南科学》
2013年第10期1613-1614,共2页
Henan Science
基金
国家自然科学基金委青年科学基金(21005034)
