摘要
激光焦点位置检测与跟踪技术是激光加工的关键技术之一，本文讨论了激光切割加工系统中焦点位置误差的产生和常用的两种检测系统的组成原理及其使用中的优缺点，分析了切割过程中等离子云对电容传感器的干扰机理，进而提出了两种有效的解决方法。
The laser focus auto－ tracking technology is one of key technologies to ensure laser cutting processing quality. The ways of producing laser focus position error, error of workpiece shape, error of fixing and error of programming are introduced first. Then two kinds of structures of laser focus position detecting system, using inductance transducer and capacitance transducer as sensor, are discussed. Their advantages and disadvantages are discussed following. The principle how plasma caused in laser cutting process disturbs detecting of laser focus position is analyzed. Two ways to overcome this disturbing, changing the shape of pole plank of capacitance transducer and indirectly detecting way, are studied finally.
出处
《制造业自动化》
2000年第12期33-35,38,共4页
Manufacturing Automation
关键词
激光加工
传感器
焦点跟踪
laser cutting
motion controller
focus tracking
