摘要
介绍了晶体生长炉籽晶杆高精度回转夹具的结构及工作原理,对现有的籽晶杆回转夹具进行了分析,从定位原理,不同直径大小籽晶杆的通用性及籽晶杆的径向跳动误差值大小等方面进行了详细分析,找出了定位长度短是影响夹具旋转精度的主要因素。设计并制作了一种由两个同轴安装的三爪卡盘组成的高精度回转夹具,由限制籽晶杆的两个自由度转变为限制籽晶杆的四个自由度,提高了定位精度,通过实验测定工作时的径向跳动,误差值大幅减小,提高了回转精度。
The basic principles of crystal growth seed rod precision fixture,as well as its advantages are introduced.And making the current seed rod fixture analyzed.The influences of different process parameters are discussed,such as registering,different diameter,radial circular run and so on.Views on how to increase accuracy of rotational is work piece length.Then an optimal design for crystal growth seed rod is proposed.It has proved its properties to be stable and its operations to be dependable.
出处
《机械设计与制造》
北大核心
2013年第11期253-255,共3页
Machinery Design & Manufacture
基金
国家自然科学基金(50972085)
关键词
晶体生长
籽晶杆夹具
旋转精度
Growing Crystal
Seed Rod Precision Fixture
Accuracy of Rotational
