MEMS航空微时代

MEMS Era of Aviation

MEMS(Micro Electron Mechanic Systems)技术是从专用集成电路(ASIC)技术发展过来的,已经在电子产品、汽车工业、机械、化工及医药等各领域得到广泛的应用。近年来,MEMS器件在航空领域的应用越来越受到各国重视。本文首先介绍了MEMS加速度计、MEMS陀螺仪、MEMS-IMU惯性导航组合系统等目前在航空领域有一定应用前景的MEMS传感器,对这些传感器在国外的应用研究进行了汇总,最后,介绍国内已有初步进展的MEMS传感器设计应用,并指出我国的航空微时代的研究方向。

Micro electron mechanic system（MEMS） technology develops on ASIC, and has widely used in electronics, automotive, machinery, chemical and pharmaceutical fields, and so on. In recent years, more countries pay attention to MEMS devices in the aviation field. This paper introduces the promising MEMS devices firstly, such as MEMS accelerometer, MEMS gyroscope, MEMSIMU, then in vestigates and summarizes the foreign studies of these sensors. Finally, it introduces the initial progress of MEMS sensor in China, and points out the direction of MEMS aviation.