摘要
基于UMC 0.18μm 1P6M CMOS工艺流程,设计了一种全差分输出的空间调制光电探测器(SMPD)。利用商用器件仿真器ATLAS建立了器件模型,对N-well宽度和间距进行了优化。基于优化的器件结构,对SMPD的光谱响应、带宽和瞬态特性进行了二维模拟。模拟结果表明,探测器在650nm处的响应度为0.23A/W,当器件有效受光面积为120μm×120μm、反偏电压为5V时,-3dB带宽约为942MHz。瞬态响应曲线表明,器件可用于1.25Gb/s数据速率的光探测。
A fully differential spatially modulated photodetector (SMPD) is designed based on UMC 0.18μm 1P6M CMOS process. The SMPD is modeled utilizing a commercial device simulator, and the influences of N-well width and interval on device performance are performed. The simulation results show that the SMPD has a responsivity of 0.23A/W at 650nm. A -3dB bandwidth of 942MHz is achieved when the SMPD with an overall optical window of 1201mxl20p, m is biased at -5V. The transient response curves demonstrate the ,qMPl-) c.an he. annlie.d for 1 25Cth/ re.turn-Tte.ro data
出处
《光通信技术》
CSCD
北大核心
2013年第11期30-33,共4页
Optical Communication Technology
基金
国家自然科学基金(61036002
61106052)资助
天津市自然科学基金(11JCZDJC15100)资助