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Effect of Photothermal Treatment on Properties of Ge Thin Films

Effect of Photothermal Treatment on Properties of Ge Thin Films
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机构地区 Faculty of Engineering
出处 《材料科学与工程(中英文A版)》 2013年第7期475-480,共6页 Journal of Materials Science and Engineering A
关键词 薄膜性能 锗薄膜 治疗 光热 等离子体放电 光学性质 蓝宝石衬底 UNICO Germanium thin films, vacuum photothermal processing (VPP), crystallization.
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参考文献19

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