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MEMS万向惯性开关工艺研究 被引量：1

MEMS-based Universal Inertial Switching Technology
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摘要 文中介绍了万向开关的工作原理,针对万向惯性开关的结构要求,利用ICP技术对设计结构进行加工,给出了详细加工工艺流程,并分析了工艺流程中的关键技术,并给出了加工和封装后的实物照片。 This paper introduced the working principle of universal inertial switch, aimed at universal inertial switch structure, using the ICP technology to the design of structure for processing. The paper presented the detailed process, and analyzed the process of the key technology, and gives the processing and packaging of photographs.
作者 郝永平 张磊 刘双杰
机构地区 沈阳理工大学CAD/CAM技术研究与开发中心
出处 《仪表技术与传感器》 CSCD 北大核心 2013年第10期14-15,34,共3页 Instrument Technique and Sensor
关键词 MEMS万向开关 ICP 加工工艺 MEMS universal switch ICP processing
分类号 TM564.6 [电气工程—电器]
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仪表技术与传感器
2013年 第10期

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