摘要
采用直流磁控溅射方法在表面氧化的Si(001)基片上制备不同厚度的FePt薄膜,并利用原子力显微镜(AFM)、X射线衍射(XRD)和振动样品磁强计(VSM)表征样品的形貌、结构和磁性.结果表明:将薄膜样品在H2气氛中经600℃退火1h,得到了L10-FePt薄膜;薄膜具有(001)织构或明显的(001)取向生长,随着沉积厚度的增加,FePt的晶粒尺寸变大,样品的有序化程度增大,(001)取向生长呈减弱的趋势;样品均具有明显的垂直磁各向异性,随着薄膜厚度的增加,平行膜面矫顽力增大,垂直膜面矫顽力先增大后减小,当沉积厚度为10nm时,样品的垂直磁各向异性最佳.
FePt thin films of different thicknesses were prepared by magnetron sputtering on thermally oxidized Si substrates and annealed at 600 ℃ for 1 h in hydrogen to obtain L10-FePt films.The results of X-ray diffraction show that L10-FePt films have a (001) texture or obvious growth in (001)orientation.The grain size of FePt and the degree of ordering increase,and (001) orientation decreases with the increased deposition thickness.Magnetic data exhibit the in-plane coercivity increases,while the out-of-plane coercivity first increases and then decreases with the increased film thickness.When the film thickness is 10 nm,the sample has the most perpendicular magnetic anisotropy.
出处
《吉林大学学报(理学版)》
CAS
CSCD
北大核心
2013年第6期1143-1147,共5页
Journal of Jilin University:Science Edition
基金
国家自然科学基金(批准号:20971055
21371071)
教育部科技研究重点项目(批准号:208178)
关键词
FePt薄膜
厚度
织构
磁性
FePt film
thickness
texture
magnetic property