沉积厚度对L1_0-FePt薄膜(001)织构和磁性的影响

Effect of Deposition Thickness on(001)Texture and Magnetic Properties of L1_0-FePt Thin Films

采用直流磁控溅射方法在表面氧化的Si(001)基片上制备不同厚度的FePt薄膜,并利用原子力显微镜(AFM)、X射线衍射(XRD)和振动样品磁强计(VSM)表征样品的形貌、结构和磁性.结果表明:将薄膜样品在H2气氛中经600℃退火1h,得到了L10-FePt薄膜;薄膜具有(001)织构或明显的(001)取向生长,随着沉积厚度的增加,FePt的晶粒尺寸变大,样品的有序化程度增大,(001)取向生长呈减弱的趋势;样品均具有明显的垂直磁各向异性,随着薄膜厚度的增加,平行膜面矫顽力增大,垂直膜面矫顽力先增大后减小,当沉积厚度为10nm时,样品的垂直磁各向异性最佳.

FePt thin films of different thicknesses were prepared by magnetron sputtering on thermally oxidized Si substrates and annealed at 600 ℃ for 1 h in hydrogen to obtain L10-FePt films.The results of X-ray diffraction show that L10-FePt films have a （001） texture or obvious growth in （001）orientation.The grain size of FePt and the degree of ordering increase,and （001） orientation decreases with the increased deposition thickness.Magnetic data exhibit the in-plane coercivity increases,while the out-of-plane coercivity first increases and then decreases with the increased film thickness.When the film thickness is 10 nm,the sample has the most perpendicular magnetic anisotropy.