可燃及有毒有害气体检测系统在多晶硅生产中的应用

Flammable and Toxic and Hazardous Gas Detection System in Polysilicon Production

为保证工业化生产多晶硅工艺的安全、连续与可靠性,设计可燃H2、有毒有害气体HCl和Cl2检测系统,及时检测出管道的泄漏点,并与暖通空调系统联动排出厂房内的可燃和毒害气体。

In order to ensure the safety,continuity and reliability of polysilicon production,the detection system for gases like H2,HCl and Cl2 was designed so as to have pipeline leakage detected timely and any flammable and toxic gas discharged out of the plant through working together with the HVAC system.