摘要
以瑞利型声板波为例,在有限元软件COMSOL中建立了声板波二维模型,仿真分析了声板波在自由空间中和负载液体时的特征频率。仿真研究表明:无论基片背面为自由边界还是金属边界,负载液体时都会导致声板波A0和S0模态特征频率发生变化,从而可用于液体的特征参数检测;由于S0模态负载液体时会产生一定的衰减,因此声板波的A0模态比S0模态更适于液体传感。实际制作了两组声板波器件,采用网络分析仪测量了器件的幅频特性,实验结果与数值仿真结果基本一致,证明了理论模型的正确性和数值仿真的有效性。
A two -dimensional model of Rayleigh acoustic plate mode wave（APM ） was established by the finite element software COMSOL ,and the characteristic frequency of APM was simulated both in the free space and with liquid loading .The simulation research shows that no matter the substrate’s backside is free boundary or metal boundary condition ,liquid loading would result in the change of characteristic frequency of A0 and S0 mode ,so the A0 and S0 mode could be used for the measurement of liquid characteristic parameters .The S0 mode would attenuate because of liquid loading ,so the A0 mode is more suitable for liquid sensing .Two types of APM devices were fabricated ,and their ampli-tude-frequency characteristics were measured by network analyzer .The experimental results are in accordance with the numerical simulations ,which shows the correctness of the theoretical model and the validity of the numerical simulation .
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2013年第22期3071-3074,3079,共5页
China Mechanical Engineering
基金
国家自然科学基金资助项目(51005121)
航空科学基金资助项目(2010ZD52045)
江苏省科技支撑计划工业项目(BE2011180)
江苏高校优势学科建设工程资助项目
关键词
声板波
模态
特征频率
边界条件
acoustic plate mode wave（APM ）
mode
characteristic frequency
boundary condition
