一种新型地下震动传感器设计

Design of a new underground vibration sensor

针对地下浅层分布式震源定位过程中,无法有效获取爆破震动矢量信息的问题。按照最优阻抗匹配原则和姿态测试原理,介绍了一种基于MEMS技术和灌封工艺技术的新型地下震动传感器,通过ABAQUS软件对球形结构的高阶模态分析以及对样机幅频特性、线性度、轴间串扰等特性的实验标定,结果表明球形传感器结构合理,传感器样机三轴特性一致、正交性好、轴间抑制比高,能够可靠地接收全向震动信号,在地下空间定位中具有一定的工程应用价值。

Aiming at the problem that it is difficult to obtain the blasting vibration vector information in the localiza- tion process of shallow underground distributed source, a new type of omnidirectional underground vibration sensor is proposed in the light of the optimal impedance matching principle and attitude testing mechanism, which is based on the MEMS technology and sealing technology. The high modal analysis on the spherical structure was performed with the ABAQUS software, and the experimental calibration of the prototype amplitude-frequency characteristic, linearity and inter-axis crosstalk were conducted. The experimental results show that the spherical sensor has reasonable struc- ture;the sensor prototype features consistent triaxial characteristics, good orthogonality and high inter-axis rejection ratio ;the sensor can reliably receive omnidirectional vibration signals. The proposed sensor has important value for the engineering application in underground space positioning.