单频激光干涉仪采样系统设计

Design of Single-Frequency Laser Interferometer Sampling System

为了解决在纳米级,甚至亚纳米级高精度位移测量时,激光干涉仪测量数据读数精度不高的问题,本文将改进型的Edlen公式引进到激光干涉仪软件程序中,提高激光干涉仪的读数准度,并且扩大其工作范围。改进型Edlen公式的使用和对程序的改写,使激光干涉仪软件所显示的数据精度更高,更准确,有效地减小了环境因素对激光干涉仪读数的影响偏差。

In order to improve the data reading accuracy of laser interferometer concerning the measurement accuracy at the nanometer level, even the sub-nanometer level, this paper introduced a modified Edlen formula into the laser interferometer software program to improve the reading accuracy of laser interferometer and expand the scope of its work environment. The use of modified Edlen formula made the data precision of laser interferometer software higher and more accurate, and effectively reduced the influence of environmental factors on the laser interferometer reading deviation.