摘要
采用等离子体增强化学气相沉积(既CVD)、磁控溅射和阴极电弧离子镀技术相结合的方法,合理利用金属Cr靶和TiAl靶,选择性地在硬质合金基体上沉积了具有不同中间层(Cr、TiAI、TiAlN、Cr/TiAI/TiAlN)的复合结构体系类金刚石(DLC)涂层。选用拉曼光谱、光学显微镜、扫描电子显微镜和能谱仪对涂层形貌和结构进行表征测试。同时,利用显微硬度计、洛氏硬度计、划痕测试仪和球磨仪系统地分析了涂层的力学性能。研究结果表明:基体/Cr/TiA1,TiAlN/DLC涂层体系综合性能最佳,具有较高硬度(~3251HV)的同时结合性能最优(结合力~56.2N),且抗磨损能力最强。Cr/TiAl/TiAlN较其它中间层可更有效地缓解涂层体系内应力并提高基体/涂层间的结合强度和抗磨损能力。基体/TiAlN/DLC涂层体系复合硬度最高(-3350Hv),但其韧性最差、结合力最低(-35N),在硬质合金基体上直接沉积TiAlN作为中间层不利于提高基体/涂层间的结合强度。
Cr/DLC, TiA1/DLC, TiA1N/DLC and Cr/TiA1/TiA1N/DLC composite coatings were deposited on cemented carbides by combination of PECVD, magnetron sputtering and cathodic arc ion plating. Scanning electron microscopy, photoelectron spectroscopy, EDS, micro-hardness tester, Rockwell-C indenter, scratch tester, ball-on-disk wear tester were used to study the composition, morphology, micro-hardness, toughne,~s, interfaeial adhesion performance and wear resistance of the DLC coatings in detail. The results show that the highest adhesion (-56.2N)of the coatings among the four coating samples is gained by multi-layer DLC sample with the structure of Cr/TiA1/TiA1N/C, whose micro-hardness is -3251HV. Meanwhile, the toughness of DLC coating is also significantly imppoved with Cr/TiA1/TiA1N interlayers. Wear resistance of Cr/TiA1/TiA1N/DLC composite coatings is much higher than that of others when the wear cycle is exceed to 300. The toughness and adhesion of TiA1N/DLC sample shows the worst performance among lhose samples, even though its micro-hardness is the highest one.
出处
《真空》
CAS
2013年第6期1-6,共6页
Vacuum
关键词
类金刚石
中间层
抗磨损能力
结合强度
diamond-like carbon
interlayers
wear resistance
adhesion