摘要
本文主要介绍用于激光加载材料非冲击压缩实验研究中的铝台阶/氟化锂复合靶的制备与相关参数的测量。铝台阶/氟化锂复合靶主要通过光学抛光减薄、离子束刻蚀台阶、表面减反膜制备、铝薄膜的精密轧制以及薄膜精密装配等加工技术与工艺流程制备。制备的铝台阶/氟化锂复合靶基本满足物理实验要求,获得了较好的实验结果。
The fabrication and measurement of Al-step/LiF composite targets were pres- ented, which are usually used in laser drive shockless compression experiments. A1- step/LiF composite targets were prepared with the processes including optical polishing, ion beam etching, antireflection film coating, precision rolling of the AI films and precise micro-assembly. The prepared Al-step/LiF composite targets met the demand of experiments, and obtained very good experimental results.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2013年第11期2146-2151,共6页
Atomic Energy Science and Technology
基金
863计划资助项目(2010AA8041015)
关键词
激光
非冲击压缩
铝
氟化锂
离子束刻蚀
Key words., laser
shockless compression A1
LiF
ion beam etching
