基于直线型超声马达的压电振子特性仿真分析

Analysis of Rectangular Piezoelectric Vibrator Based Linear Ultrasonic Motor

通过运用Ansys有限元分析软件建立了压电振子的有限元模型,对压电振子进行了尺寸优化、模态分析、谐响应分析、瞬态动力学分析。通过仿真得到了压电振子的振型,计算了压电振子L1B2纵弯复合振动模态的最佳频率,得到对应动态支路等效电路的各项参数,验证了压电振子驱动足椭圆运动的形成。仿真结果对利用纵弯复合模态的超声波电机的设计具有重要的指导意义,为超声波马达的制作和实验研究奠定了基础。

Finite element model of the motor was established. A serial of analysis including size adjustment, modal, harmonic responses, transient were made using Ansys software. Vibrating mode of the piezoelectric resonator was obtained with simulation, the parameters of the corresponding dynamic branch equivalent cir- cuit and the frequency of the vibration with longitudinal and bending mode was calculated. The elliptical trace of the driving foot of the piezoelectric resonator was tested with simulation. Result of the simulation has value for the prototype making and the experiment of the motor.