硅微陀螺正交校正结构设计与试验

Design and test of quadrature correction structure for silicon micro-gyroscope

为从源头上消除硅微陀螺的正交误差,采用静电修调方法,研究正交校正结构设计问题.在分析静电修调原理的基础上,探讨校正电极设计原则以及结构形式的选取,设计布局方案消除干扰静电力,并通过参数优化提高校正结构的面积利用效率.为自主研制的某型双质量硅微陀螺设计正交校正结构,使其理论上具备以12 V直流电压校正405(°)/s正交误差的能力.加工试验表明,对具有354(°)/s正交误差的表头,施加11.6 V直流电压可实现正交校正,结构的正交校正能力略小于但接近设计值.研究的正交校正结构设计方法在线振动式Z轴硅微陀螺中具备通用性和实用价值.

To eliminate quadrature error of silicon micro-gyroscope at the source,electrostatic trim-ming is employed and design issues about quadrature correction structure are investigated.Based on the analysis of the electrostatic trimming principle,design fundamentals and pattern selection of the correction electrodes are discussed.A layout scheme was designed to eliminate interfering electrostat-ic forces and parameter optimization was carried out to improve the area utilization efficiency.For a dual-mass silicon micro-gyroscope developed by our laboratory,quadrature correction structure was designed with a theoretical capability of correcting quadrature error up to 405 （°）/s with DC（direct current）voltage less than 12 V.Experimental results on a processed and packaged gyroscope show that for the actual quadrature error of 354 （°）/s,quadrature correction can be realized with a DC voltage of 11.6 V.The correction capability is a little smaller than but approaching the designed val-ue.The design methods are commonly applicable on a linear vibrated Z-axis silicon micro-gyroscope and have their practical application values.