原子力显微镜测试光学超光滑表面微轮廓的研究

Study on Testing Method for Microprofile of Optical Supersmooth Surface

论述了使用原子力显微镜测量超光滑光学表面的优点及其在光学领域中的重要应用 ,列举了用这种方法测试得到的超光滑光学表面微轮廓图及纳米量级的微缺陷 ,以及这些表面镀膜前后表面形态结构和微粗糙度的变化。作为比较 ,列举了用干涉轮廓仪测得相同表面的微粗糙度参数等。由于原子力显微镜有三维的高精度 ,而干涉方法只有一维的高精度 。

Some advantages and important application of the testing method for optical supersmooth surface using atomic force microscope (AFM) are discussed. Some testing results of microprofile and micro defect with nonometer grade for optical supersmooth surface using AFM method are presented, and the change of morphology and micro roughness before and after coating of same surface is given. For comparison, testing results of micro roughness parameters for same surface measured using interference profiler are presented too. It is indicated that AFM method has three dimensional high accuracy, but interference method has only one dimensional, so the former can give true morphology and microprofile of surface.