摘要
采用原子力显微镜 ( AFM) ,对常见的氧化物单层膜、增透膜和高反膜的表面形貌进行了观测 ,并初步研究了激光预处理对薄膜表面形貌的影响。
The surface morphology of several oxide dielectric coatings, anti-refl ecting coating and reflect mirror have been observed by atomic force microscope. The effects of laser conditioning of optical coating are also discussed.
出处
《电子显微学报》
CAS
CSCD
2000年第5期704-708,共5页
Journal of Chinese Electron Microscopy Society
关键词
光学薄膜
表面形貌
原子力显微镜
optical coatings
surface morphology
atomic force microscope
