一台入射距离为155mm的XUV平场光谱仪

A Flat-field XUV Spectrometer with 155mm Incidence Dist ance

利用光路追踪程序对不同入射距离的变栅距平场光栅的成像进行了研究和设计。在此基础上研制了一台与传统平场光栅谱仪不同的入射狭逢到光栅中心距离为 1 55mm的掠入射平焦场谱仪。该谱仪的波段范围为 4～ 4 0 nm,光谱分辨率为 0 .0 1 nm。利用该谱仪成功地获得了 Ti元素的激光等离子体光谱。

Using a ray-tracing cod e, A flat-field grazing-incidence spectrometer with 155mm inc ident distance was designed. This is different from the conventional design for a flat-field grazing-incidence spectrometer. This spectrometer has good spectral resolution as well as smaller size and improved flexibility. The spectrum covers wavelength ranges of 4～40nm and the spectral resolution is 0.01nm.