摘要
扼要介绍采用薄膜双层布线技术研制的幅相变换器的性能、版图设计、制造工艺及测试结果。
The property, layout, processing technology and test result of amplitude-phase converter fabricated by thin film double-layer distribution are presented in brief.
出处
《电子元器件应用》
2000年第12期20-23,共4页
Electronic Component & Device Applications
