我国多晶硅铸锭坩埚的现状与发展

Current Situation and Development of the Crucibles for Multicrystalline Silicon Ingots in China

本文总结了我国多晶硅锭坩埚生产现状,指出熔融石英材质坩埚仅能一次性使用,可反复使用的坩埚是发展方向,介绍了国内外可反复使用坩埚的主要生产技术。

The manufacturing status of the polysilicon ingots crucible is summarized in the paper. Since the fused quartz crucible can be used only once, crucible which can be used repeatedly is the trend of development. The paper introduces its main manufacturing techniques.