钨金属化氧化铝陶瓷基片的脱脂工艺研究

Degreasing Process Research of Alumina Ceramic Substrates Metalized with Tungsten Paste

采用热分析、显微分析、扫描电镜分析等方法对样品进行检测，研究了钨金属化氧化铝陶瓷基片的脱脂工艺，确定了合理的脱脂升温制度和脱脂气氛。结果表明，脱脂升温速率为1—2℃／min，并于215℃、350℃保温15min，脱脂后样品光滑平整，宏观无缺陷；湿氢气气氛下脱脂可以将有机成分完全排除，避免了出现碳残余、金属化层被氧化以及脱层等问题。

Degreasing process of alumina ceramic substrates was studied. Through the thermal analysis, scanning electron microscopy （SEM） analysis, and microscopic analysis of samples, the temperature system and atmosphere for degreasing were determined. The results show that samples after degreasing were smooth and non-defective, when the heating rate was 1-2℃/min, and heat preservation at 215℃ and 350℃ for 15 min. And organic ingredients can be completely ruled out with wet hydrogen atmosphere. Then the problems such as carbon residue, and metallization layer oxidized, and delaminating were defused.