基于MEMS技术的梯形悬臂梁密度传感器

Trapezoidal Cantilever Density Sensor Based on MEMS Technology

本文采用基于MEMS技术的梯形悬臂梁密度传感器分别在26-34℃和30-50℃范围内，对甲苯和0．65CS二甲基硅油进行了密度实验研究。选用甲苯作为标准液对该传感器的工作参数进行标定，并测量了甲苯在26℃,30℃和34℃处的密度值。将甲苯的密度实验值与参考值进行比较，得到最大绝对偏差和平均绝对偏差分别为0．70％和0．43％。使用已标定的密度传感器对0．65CS二甲基硅油进行密度测量，并将硅油的密度实验值与参考值进行比较，得到最大绝对偏差和平均绝对偏差分别为4．21％和4．16％，低于5％，满足工程上的需要。

A trapezoidal cantilever density sensor based on MEMS （Micro Electro Mechanical Systems） technology is used to measure the density of toluene and 0.65 cs dimethyl silicone oil at 26-34℃ and 30-50℃, respectively. Toluene is used as a standard solution to calibrate the working parameters of the trapezoidal cantilever density sensor. The density values of toluene at 26℃, 30℃ and 34℃ are measured and the maximum and the average absolute deviations of the measurements from the references are 0.70% and 0.43%, respectively. The density values of 0.65 cs dimethyl silicone oil are also measured and compared with references. The maximum and the average absolute deviations of the measurements from the references are 4.21% and 4.16%, respectively. And the deviations are less than 5%, meeting the need of engineering.