多晶硅制绒中影响金字塔结构因素的研究

Study on the Factors Influencing Pyramidal Structure in Texturing Polycrystalline Silicon Process

通过分析不同碱性溶液及添加不同活性剂制备出的具有不同金字塔结构的绒面，探讨了影响金字塔成核的因素。采用扫描电镜和紫外一可见分光光度计对绒面的金字塔结构和反射特性进行了分析，结果表明，腐蚀速率与金字塔尺寸成正比，金字塔结构影响绒面减反特性。对造成金字塔结构差异的原因和金字塔成核过程进行了分析。

By analyzing pyramidal structures textured by different alkaline solutions and sur- factants,the factors influencing nucleation of pyramids are discussed. The pyramidal struc- ture and reflectance of the textured surface are analyzed by SEM and ultraviolet-visible spec- trophotometer test. The results show that etching rate plays a key role in texturing. Etch- ing rate is proportional to the pyramidal size. The pyramidal structure influences the reflec- tance of the textured surface. Optimized etching rate results in desired pyramidal structure. At last, the reasons which caused the difference of the pyramidal structures and the progress of nucleation are analyzed.