二维微动工作台的定位误差补偿实验

Experiment on Compensation of Positioning Error for Two-dimension Micro Displacement Stage

随着科学技术的发展，超精密定位技术在各领域得到了广泛应用，它的研究对MEMS技术的发展具有重要的意义。对具有纳米定位精度的二维微动工作台的定位误差进行研究。首先，对分辨率为0.15 nm的双频激光干涉仪进行了测量误差分析，其标定二维微动工作台时的测量精度为14.4 nm；利用该激光干涉仪标定时温漂的近线性关系去除了定位误差中的综合误差，采用反相补偿法对定位误差中的系统误差进行了补偿。测得该工作台补偿前的定位误差在250～300 nm之间，在空气弹簧隔振平台上进行了误差补偿实验，测得补偿后两轴的定位误差分别为20 nm和25 nm左右。实验证明了该种方法用于补偿纳米定位系统的可行性。

Along with the development of science and technology,the ultra-precision positioning technology has been widely ap-plied in various fields,and its research is of great significance for the development of Micro-electromechanical Systems （MEMS）tech-nology. The research on compensation of positioning errors for two-dimension micro displacement stage with nano-positioning accuracy was aimed at. Firstly,the measurement error of two-frequency laser interferometer with resolution at 0.15 nm was analyzed,and the measuring accuracy was at 14.4 nm when it was calibrating the two-dimension micro displacement stage. The synthetic error in positio-ning errors by the approximately linear relationship of temperature drift when calibrating by using it was removed,and the systematic er-ror in positioning errors was compensated by reversed phase method. The error compensation experiments were done in the air spring platform,and it was found the measured positioning error of the stage,before compensation,was between 250~300 nm,then the posi-tioning errors of the two axes were measured separately within about 20 nm and 25 nm after compensation. The experiment proves the feasibility of the method used to compensate for nano-positioning system.