精密位移台的控制软件开发

Development of Control Software for the Precision Displacement Stage

针对精密位移台的自动化控制,以Visual C++为开发平台,应用面向对象的软件开发方法,编制了人机操作界面。引入示教编程方法,给出了示教编程的实现代码,减轻了控制算法的开发量,实现了复杂的运动过程。分析软件的模块功能和时效性,最终实现了位移台控制软件。由位移台的重复定位精度测量结果可知,重复定位精度达1μm,实现了位移台的精确定位控制。

For precision displacement stage,taking Visual C＋＋ as development platform,object oriented programming （OOP） method was used to program the man-machine interface. The teach programming method was introduced and the related source code was displayed,the development work of control algorithm was reduced and complex moving process was achieved. Coupling with the analy-sis on the module function and timeliness for the software,the displacement stage control software was finally developed. The measure-ment for the repeat positioning accuracy of the displacement stage shows that its positioning accuracy reaches 1 μm. So accurate posi-tioning for the precision displacement stage is realized.