TiO_2薄膜和多孔薄膜的溶胶-凝胶法制备与表征

The Preparation and Characterization Of Nanostructure TiO_2 Thin Films and TiO_2 Porous Thin Films By Sol-Gel Method

本文以钛酸丁酯[Ti(OC4H9)4]、去离子水、盐酸和聚乙二醇(PEG)1000为原料,采用溶胶-凝胶法和旋转涂膜工艺,在玻璃基底上制备纳米TiO2薄膜和TiO2多孔薄膜。利用原子力显微镜(AFM)、X射线衍射仪(XRD)和紫外-可见光谱仪(UV-Vis)对薄膜进行分析表征。结果表明,实验制备的TiO2粉体为锐钛矿晶型,纳米TiO2薄膜的平均粗糙度为17.2nm,TiO2多孔薄膜平均粗糙度为1.55 nm。TiO2多孔薄膜有较高的透射性和光催化活性,可直接用于光催化降解有机物等领域。

Using [ Ti （OC4H9）4 ], HEO, HCL and （PEG）1000 as raw materials, TiO2 thin films and TiO2 porous thin films were prepared on glass substrate by sol-gel method. The nano-structure TiOa were characterized by AFM, XRD and UV-Vis spectra.The results show that TiO2 powder＇s structure is anatase phase, and the average roughness is 17.2nm and 1.55nm for TiO2 thin films and TiO2 porous thin film respectively. The excellent transmissivity and photocatalysis performance of the TiO2 porous thin films will be applied in the field of the decomposition of organic compound.