基于图像处理的芯片尺寸测量系统研究

Measurement System for Semiconductor Chips Based on Image Processing

利用图像处理技术设计了一个芯片尺寸测量系统,实现了对芯片电路尺寸的精确测量。介绍了测量系统的组成,以及对采集的显微图像进行的灰度化、滤波降噪、阈值分割、边缘检测等处理,并通过一块已知尺寸的半导体芯片对测量系统进行了标定。最后,利用该系统对芯片电路的线宽进行了测量。实验结果表明,该测量系统具有较高的精度。

A measurement system for semiconductor chips is designed with image processing technology. It achieves accurate measure- ment for circuit size on semiconductor chips. The composition of the measurement system is introduced, the graying, the filter denoising, the threshold segmentation, and the edge detection for the microscopic image are analyzed. The system is calibrated by a semiconductor chip whose size is already known, and it is used to measure the circuit size on a semiconductor chip. The experimental result shows that the sys- tem has a high precision.