星形微波等离子体化学气相沉积装置上类金刚石薄膜的制备

Diamond-like carbon films deposited on star-shape microwave plasma enhanced chemical vapor deposition equipment

以甲烷、氢气和氧气为反应气体,分别在镜面抛光的单晶硅片和石英玻璃基片上制备了类金刚石薄膜,并用扫描电子显微镜、激光拉曼光谱和傅立叶红外透射光谱仪等测试方法对薄膜的表面形貌、质量和光学性能进行了表征;通过对类金刚石(DLC)薄膜制备过程中碳源浓度、基片温度等参数的研究,掌握了工艺参数对薄膜性能的影响规律,并在此基础上成功地对薄膜的沉积工艺进行了优化.结果表明,当反应气体中的流量配比为甲烷∶氢气∶氧气=10∶100∶1,腔体压力和基片温度分别为0.5kPa和400℃,制备出的DLC薄膜表面光滑平整,薄膜中的纳米金刚石特征峰明显,在石英玻璃上沉积的DLC薄膜在3 000～4 000cm-1波数区间透光率超过80%,达到了光学应用要求.

Diamond-like carbon （DLC） films were deposited on the star-shape microwave plasma enhanced chemical vapor deposition equipment.By using methane,hydrogen and oxygen as the reactive gases,DLC films were deposited on mirror-polished monocrystalline silicon and quartz glass substrates.Scanning electron microscope,raman spectroscopy and fourier transform infrared spectrometer were used to detect the surface morphology,quality and the optical properties of DLC films.The parameters during the deposition process such as the methane concentration and the substrate temperature were systematically studied.Results show that the smoother surface and the more obvious nanodiamond characteristic peak of DLC films are obtained when the flow rate ratio of the reactant gas is methane ∶hydrogen∶ oxygen=10 ∶ 100 ∶ 1,and the chamber pressure and temperature of the substrate are respectively 0.5 kPa and 400 ℃.Transmittance of DLC films in the wave range of 3 000 cm-1 to 4 000cm-1 deposited on quartz glass is more than 80%,which is adaptive for the optic application.