摘要
环境扫描电子显微镜 (ESEM)保留了传统扫描电子显微镜的全部优点 ,但取消了样品环境必须是高真空的限制。在气体压力高达 660 0 Pa,温高达 1 50 0℃ ,具有任何气体种类的多气环境里 ,ESEM都可提供高分辨率的二次电子成像。本文介绍了 ESEM的特点、应用领域及
The Environmental Scanning Electron Microscope(ESEM) retains all of the performance advantages of a conventional SEM.without the high vacuum constraint on the sample environment.The ESEM offers high resolution secondary electron imaging in a gaseous environment ofpractically and composition,atpressures as high as660 0 Pa,and temperatures as high as1 50 0℃ .In this paper will be instroduced the characteristic,application and X- ray analysis of ESEM.
出处
《真空电子技术》
2000年第6期21-23,29,共4页
Vacuum Electronics
