洁净间微环境洁净度管控系统分析

Clean Room Minienvironment Cleanliness Control System Analysis

空气净化和洁净室技术是20世纪50年代逐渐形成和发展起来的一门综合性和系统性的新兴技术。它是研究产品工艺和科学实验与其环境的关系,防止产品的生产以及科研的成果受其环境因素的干扰和影响,保护被加工的产品和科研的成果不受有害的污染物质污染的专门技术。但由于现在客户群体的多元化,促使洁净度技术概念从"空调净化"向"受控环境"拓展。最近薄膜晶体管液晶显示模块(TFT-LCD)制造业,随着逐渐要求更高的分辨率产品,导致设计电路线宽变窄、各像素(pixel)大小显著变小的倾向,洁净间内particle管理显得越来越重要。主要通过对薄膜晶体管液晶显示模块(TFT-LCD)产线导入微环境管控后,取得了很好的效果来分析微环境洁净度管控系统。

Clean air and clean room technology is gradually formed and developed in the 1950 s of a comprehensive and systemic emerging technologies o It is the study of relation of product process and scientific experiment and the environment, to prevent the production and scientific research achievements by the environmental factors of interfer- ence and influence, protection of processed products and scientific research achievement is not contaminated with harmful substances pollution of technical expertise o But now due to the diversification of customer group, encourage cleanliness technology concept from ＂air conditioning purification＂ to ＂controlled environment＂ o In recent time thin film transistor liquid crystal display module （TFT - LCD） manufacturing, with the higher resolution products gradually, lead to design electric narrow line width, lead to design electrical line width narrowing each pixel （pixel） tend to signifi- cantly smaller size, clean between particle within the management of more and more important o This paper mainly through to the thin film transistor liquid crystal display（TPT - LCD） module production line imported micro-environment control, good effect is obtained to analyze the micro environment cleanliness control system o