洁净区域压力梯度分析及控制方法探讨

Investigation on Analysis and Control Method about Pressure Gradient of Cleaning-Room Area

为保证多区域洁净室的可靠运行,对洁净区域压力梯度的分析方法和有效控制方案进行了深入探讨。结合多区通风网络分析方法和计算流体力学分析方法构建了洁净室多区域耦合分析模型,为压力梯度的合理设置及洁净室设计和运行评价确立了有效的方法;综合分析净化工程中现有的压力控制措施并结合分析模型提供的控制参数优化设置方法明确了压力梯度的控制方案,为实现洁净室的高效运行提供了参考。

To ensure more reliable operation of cleaning-room with multi-zone, in-depth discussion and investigation were conducted on analysis methods and effective control programs about pressure gradient of cleaning-room area. Combined with multi-zone ventilation network analysis method and computational fluid dynamics analysis method, multi-zone - local coupling model of cleaning-room was constructed for the pressure gradient reasonable setting and effective evaluating method of cleaning- room design and operation; the pressure gradient control scheme was determined according to the existing pressure control measures of decontamination works combined with analysis model providing optimal control parameter setting method, which provides a reference for efficient operation of the cleaning-room.