摘要
半导体洁净室的洁净度维护是一项非常专业的、庞大的工程,分析洁净室洁净度维护系统中,日常管理容易出现纰漏的情况,找到预防这些纰漏的原因,并在实际管理过程中去避免这些纰漏。
It is a professional and huge project of the cleanliness maintenance of the semiconductor clean room. Slips and errors are easily appeared during the daily management of the maintenance system of analyzing cleanliness in the clean room. We shall find out the reason of these slips and errors and avoid the mistakes in actual management process.
出处
《洁净与空调技术》
2013年第4期84-87,共4页
Contamination Control & Air-Conditioning Technology
关键词
洁净室
洁净度的维护
Clean room
Cleanliness maintenance
