光纤引导皮秒激光Al_2O_3陶瓷精细刻线研究

Fiber Induced Fine Engraved Line Study of Al_2O_3 Ceramics by Picosecond Laser

作为一项基础研究,提出了一种在陶瓷表面加工凹槽的新方法,利用光纤引导激光在陶瓷表面实现加工,并基于有限元分析法,对光通过光纤的电场强度进行了模拟,从实验和模拟两方面证明了光纤对激光具有光强增强效果,及其对光束的引导作用,能达到材料表面微结构的加工效果。与未用光纤引导激光加工的陶瓷表面做对比,光纤对光强的增强效应使得在具有高熔点、高硬脆物理特性的陶瓷表面产生刻蚀成为可能,小于聚焦光束直径(50μm)的增强区域尺寸保证了加工精度的提高。

We propose a new ways that machining grooves on the ceramics surface, using optical fiber induced laser beam to achieve the fine ceramic surface processing. The electric field intensity of laser through optic fiber were simulated based on the analysis of finite difference time domain. The enforcing effect of light intensity was demonstrated from both experiments and simulations, its role in inducing the beam can reach the material surface microstructure processing results. Comparison with unused optical fiber induced laser processing, light enhancement makes a fine etching on ceramic surface which have high melting point, high physical properties of hard and brittle. The enhanced regional less than the focused beam diameter （50 μm） ensure the machining accuracy can be improved.