摘要
The design of a two-dimensional high-frequency electrostatic microscanner is presented, and an improved method for routing isolation trenches is investigated to increase the reliability and mechanical stability of the resulting device. A sample device is fabricated and tested using an optimized micromachining process. Measurement results indicate that the sample device oscillates at inherent frequencies of 11586 and 2047 Hz around the two rotational axes, thereby generating maximum twisting angles of ±7.28° and ±5.63°, respectively, under two square waves of 40 V. These characteristics confirm the validity of our design and satisfy the requirements of a laser projector with VGA standards.
The design of a two-dimensional high-frequency electrostatic microscanner is presented, and an improved method for routing isolation trenches is investigated to increase the reliability and mechanical stability of the resulting device. A sample device is fabricated and tested using an optimized micromachining process. Measurement results indicate that the sample device oscillates at inherent frequencies of 11586 and 2047 Hz around the two rotational axes, thereby generating maximum twisting angles of ±7.28° and ±5.63°, respectively, under two square waves of 40 V. These characteristics confirm the validity of our design and satisfy the requirements of a laser projector with VGA standards.
基金
supported by the National Natu-ral Science Foundation of China(Nos.51375399 and 51375400)
the New Generation Information Tech-nology Development Foundation of Shenzhen(No.JCYJ20120614154203639)
the NPU Foundation for Fundamental Research(No.JCY20130119)
