集成微系统技术及产业发展研究

A Survey on Development of Integrated Microsystem Technology and Industry

微系统研究始于军事领域,在其早期是指"微机电系统"(MEMS)。微机电系统随着集成电路微细加工技术和超精密机械加工技术的发展而发展。随着技术的不断进步,微机电系统已更多地集成了生物、光学、计算、软件等多种技术或元件,并朝着具有感知、处理、控制、通信、致动等功能的智能化集成微系统发展。以MEMS为主流产品的微系统已大量进入消费、工业、汽车、医疗等民用市场,其在军事领域的应用研究也愈加广泛和深入。讨论了微系统的内涵,集成微系统的发展现状、发展趋势和关键技术,指出促进我国集成微系统技术和产业发展的关键点。

The research of microsystems began in military field. It was called Micro Electro Mechanical System （MEMS） in the early period. As mierofabrication and ultraprecision machining technologies develop, great progress has been made in MEMS technology. With advancement of technologies, MEMS incorporated more technologies or components, such as biology, optics, computing, software, ete, and it is developing toward integrated intelligent microsystem with such functions as sensing, processing, controlling, communication and actuating. With MEMS as major products, microsystems have a good market in consumer, industrial, automotive, and medical electronics, and in-depth researches on microsystems for military applications are also being made. Connotation of microsystem was discussed. Present situation of integrated microsystems and the critical technologies were examined, along with its developing trend. Key factors to promote the development of integrated microsystem technology and industry in China were pointed out.