同轴配对电子回旋共振放电产生的等离子体磁场约束的影响

Magnetic Confinement of Plasmas Generated by Coaxial Twinned Electron Cyclotron Resonance (ECR) Discharge

运用朗缪尔探针诊断技术对同轴配对电子回旋共振产生等离子体磁场约束的影响进行了研究。在磁镜约束条件下,电子回旋共振源轴线附近等离子体的密度非常高,但是随着径向距离的增加等离子体的密度会迅速下降;而在会切磁场约束条件下,离子体的密度相对较低却分布均匀。这种趋势与电子温度和等离子体电势的情形类似,并且这种特性可应用于各种材料加工以满足不同的需求。

Effects of magnetic field on confinement of the coaxial twined ECR plasmas were studied using the Langmuir probe diagnostic technique.Under the magnetic-mirror confinement,the plasma density was quite high in the vicinity of the axis of the ECR sources but it decreased rapidly with increasing radial distance; while under the cusped field confinement,the density was lower but uniform.The trend was similar for the electron temperature and the plasma potential.This property may be utilized in materials processes to meet different requirements.